Comparison ledger
ABM -407B-1-S-CES293 Robot, KLA Surfscan 6200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | KLA |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | KLA Surfscan 6200 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Wafer Sizes Supported | — | 50mm (2"), 76mm (3"), 100mm (4"), 125mm (5"), 150mm (6"), 200mm (8")[2] |
| Defect Sensitivity | — | 0.10 µm diameter PSL sphere equivalent with greater than 90% capture rate[2] |
| Defect Sensitivity (alternative) | — | 0.12 µm[3] |
| Illumination Source | — | 30 mW Argon-Ion laser, 488 nm wavelength[2] |
| Haze Sensitivity | — | 0.02 ppm[2] |
| Haze Resolution | — | 0.002 ppm[2] |
| Repeatability | — | 0.5% at 1σ (mean count >500, 0.364 µm latex spheres)[2] |
| Accuracy | — | ≥99% (verified with VLSI Standards)[2] |
| Dynamic Range | — | 0.01 µm to 9,999 µm in a single measurement[2] |
| Throughput | — | Up to 100 w/hr using 150mm wafers[2] |
| Cassette Handling | — | Single puck wafer handling from two cassette (one sender/receiver, one receiver)[2] |
| Operating System / Software | — | Microsoft Windows 98, version 4.2[3] |
| Dimensions (H x W x D) | — | 168 cm x 75 cm x 77 cm (66" x 29.5" x 30.25")[2] |
| Weight | — | 240 kg (530 lbs)[2] |