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Comparison ledger

-407B-1-S-CES293 RobotversusEnvironmental

ABM -407B-1-S-CES293 Robot, Thermotron Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EnvironmentalThermotron
OEMABMThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyABM -407B-1-S-CES293 RobotThermotron Environmental
Cited variants—
Specifications
ModelABM-407B-1-S-CES293[2]Not stated[3]
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Workspace Volume (SE-600-3-3)—20.7 ft³ (586 L)[1]
Temperature Range (SE-600-3-3)—-70ºC to 180ºC (-94ºF to 356ºF)[1]
Temperature Uniformity (SE-600-3-3)—±0.5ºC (±0.9ºF)[1]
Humidity Range (SE-600-3-3)—10 to 98% RH[1]
Humidity Control (SE-600-3-3)—+/- 2.5% RH[1]
Equipment type—Environmental Chamber[3]
Manufacturer—Thermotron[3]
Manufacturer description—Environmental Test Chambers / Environmental & Vibration Testing Equipment Manufacturer[4]
Make—Thermotron[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]thermotron.comthermotron.com
  2. [2]dealer listingsemistarcorp.com
  3. [3]Equipment inventory listing
  4. [4]thermotron.comthermotron.com