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-407B-1-S-CES293 RobotversusSM 32 C Temperature Humidity

ABM -407B-1-S-CES293 Robot, Thermotron SM 32 C Temperature Humidity, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMABMThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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FamilyABM -407B-1-S-CES293 RobotThermotron SM 32 C Temperature Humidity
Specifications
ModelABM-407B-1-S-CES293[1]—
DescriptionROBOT[1]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1]—
Configuration—Chamber 1[2]
Temperature Range—-70 to +170 Deg. C –[2]
Power—208V, 3Ph, 48.2 Amps[2]
Interior dimensions (W x D x H)—38"W x 38"D x 38"H[2]
Exterior dimensions (W x D x H)—58"W x 64"D x 88"H[2]
Cooling—Air Cooled[2]
Humidity range—20% to 95%[2]
Purge—GN2 Purge[2]
Controller—Thermotron Model 8200 Touchscreen Control[2]
Refrigerants—Environmentally Friendly Refrigerants[2]
Interior—Stainless Steel Interior[2]
Features—Viewing Window, Interior Light, Castors, 1 Shelf[2]
Feed-thru ports—2x 3.75" Opposing Side Feed-Thru Ports[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]dealer listingsemistarcorp.com
  2. [2]inventory listing