Comparison ledger
ABM -407B-1-S-CES293 Robot, Ultron UH 130 Wafer Frame Expander, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Ultron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Ultron UH 130 Wafer Frame Expander |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Equipment Type | — | Die Matrix Expander[1] |
| Wafer Capacity (base model UH130) | — | Up to 8 inches (200 mm)[1] |
| Wafer Capacity (model UH130-12) | — | Up to 12 inches (300 mm)[1] |
| Ram Type | — | Pneumatic with speed control and 2.3-inch adjustable stroke[1] |
| Stage | — | Digital temperature-controlled heated stage with thermistor[3] |
| Stroke Stop | — | Adjustable for repeatable expansion[1] |
| Safety | — | Emergency stop with manual clamp[1] |
| Enclosure | — | Anti-static Plexiglass shroud[1] |
| Alignment | — | Alignment pins for precise film frame placement[1] |
| Design | — | Tabletop, easy to operate[3] |