Comparison ledger
ABM -407B-2-S-CE-S293 Robot, YES 253B-1-40-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 253B-1-40-2YES | |
|---|---|---|
| OEM | ABM | YES |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | YES 253B-1-40-2 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Product type | — | Exhaust throttle valve, butterfly valve[2] |
| Differential pressure across valve | — | 1 atm. (15 psig) max.[2] |
| External leakage at shaft seal | — | 1 x 10^-7 scc/sec He[2] |
| Materials exposed to process | — | 316L SS, Viton (where Viton is used, other materials are available; consult factory)[2] |
| Shaft seal | — | Viton[2] |
| Resolution | — | Standard: 1/10,000; Fast Motor Option: 1/2800[2] |
| Speed (open to close) | — | Standard: 7.5 sec; Optional: < 2 sec[2] |
| Valve body operating temperature | — | 0° to 90° C (32° to 194° F) max.[2] |
| Valve motor ambient operating temperature | — | 0° to 70° C (32° to 158° F) max.[2] |
| Driver/gear assembly width | — | 3.75" square (95 mm)[2] |
| Compatible controllers | — | Type 651, 652, 152G, or 252 (revision D or later) controllers[2] |
| Flange types available | — | ASA, NW Style ISO, KF Style ISO, CF, JIS[2] |
| Mounting | — | The valve may be mounted in any position by clamping its KF style flanges or through bolting its flanges to a pair of mating flanges.[2] |
| Electrical connector | — | 15-pin Type "D" connector located at the end of the 6" pigtail cable[2] |
| Closed leak rates for sealing butterfly valves | — | Less than 1.3 x 10^-7 scc/sec when new[2] |