Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Zeiss LSM 880, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | LSM 880Zeiss | |
|---|---|---|
| OEM | ABM | Zeiss |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Zeiss LSM 880 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Laser Line 405 nm | — | 30 mW[3] |
| Laser Line 458/488/514 nm | — | 25 mW multi-line[3] |
| Laser Line 561 nm | — | 20 mW[3] |
| Laser Line 633 nm | — | 5 mW[3] |
| Additional Laser Lines | — | HeNe 594 nm, pulsed 405 nm and 440 nm[4] |
| Detectors | — | 2 PMT, 1 GaAsP, 1 Airyscan (32 GaAsP)[3] |
| Frame Rate | — | 19 frames per second at 512 x 512 pixel resolution[3] |
| Computer System | — | 2x Intel Xeon E5-2623 v3 3.0 GHz, 64GB DDR4-2133 MHz ECC RAM, 4x 2TB RAID 10, NVIDIA Quadro K2200 4GB, Windows 7 Ultimate Embedded x64[3] |
| Software | — | Zeiss Zen 2.3 (Black Edition)[3] |
| Objectives | — | LD C-Apochromat 40x/1.1 W Corr, Plan-APOCHROMAT 100x/1.4 Oil Ph3, Plan-Apochromat 40x/1.3 and 63x/1.4 Oil DIC, Plan-Apochromat 20x/0.8 WD=0.55, Plan-Apochromat 10x/0.45 WD=2.0[4] |
| Scanhead | — | Quasar module with 32-channel GaAsP detector and two flanking multialkali PMTs[4] |