Waferpedia

Comparison ledger

HRG 200 Xversus3220

Accretech HRG 200 X, Disco 3220, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
HRG 200 XAccretech
3220Disco
OEMAccretechDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech HRG 200Disco 3220
Specifications
Grinding Wheel Diameter250 mm[1]—
Grinding Wheel Spindle SpeedMax. 3600 rmp[1]—
Working Spindle Speed800 rpm[1]—
Motor Power6.3 KW[1]—
Wafer Sizes2, 3, 4, 5, 6, 8 inch[1]—
Wafer Size Range2-inch to 8-inch wafers[2]—
Machine TypeFully Automatic High Rigid 2-Axis Grinder[3]—
equipment type—dicing saw[4]
Workplace size—ø150 mm[5]
Spindle layout—Single[5]
Spindle output—1.5 kW at 30,000 min-1[5]
Spindle max revolution speed—40,000 min-1[5]
X-axis feed speed range—0.1 – 500 mm/s[5]
Y-axis index step—0.0001 mm[5]
Z-axis repeating accuracy—0.001 mm[5]
Z-axis max blade size—ø58 mm[5]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]accretech.comaccretech.com
  4. [4]nanofab.utah.edunanofab.utah.edu
  5. [5]semistarcorp.comsemistarcorp.com