Comparison ledger
Agilent 11980 A, Rigaku TXRF 3760 XRF, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | TXRF 3760 XRFRigaku |
|---|---|---|
| OEM | Agilent | Rigaku |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | In-Vacuum Wafer Robotic Transfer System |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Rigaku TXRF 3760 XRF |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| Wafer size | — | In-Vacuum Wafer Robotic Transfer System[2] |
| Optics | — | Sweeping TXRF Software[2] |
| Beam configuration | — | 3-beam TXRF system[2] |
| Detector | — | Nitrogen-free detector[2] |
| Sample stage | — | Sample stage system[2] |
| Transfer system | — | In-vacuum wafer robotic transfer system[2] |
| Communication | — | ECS/GEM communication software[2] |
| Optics software | — | Sweeping TXRF software[2] |
| Capability | — | ZEE-TXRF capability[2] |
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