Comparison ledger
AJA BSG-200, AJA BSG-200Series, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BSG-200AJA | |
|---|---|---|
| OEM | AJA | AJA |
| Category | Substrate holder | Substrate holder |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | AJA BSG-200 | AJA BSG-200Series |
| Specifications | ||
| Model | BSG-200[1] | — |
| Type | Substrate holder[1] | — |
| Handled substrate size | Wafers or similar planar substrates up to 200 mm in diameter[1] | — |
| Cooling | Direct backside He, Ar or N2 gas cooling while rotating[1] | — |
| Load-lock compatibility | Load-lock compatible[1] | — |
| Pressure-enhancement feature | Peripheral weight ring around the outer edge of the substrates to maintain a 2 orders of magnitude higher backside gas pressure[1] | — |
| Handles wafers or similar planar substrates up to | 200 mm in diameter[1] | — |
| Backside cooling gases | He, Ar or N2[1] | He, Ar or N2 gas cooling[3] |
| Cooling method | Direct backside gas cooling while rotating[1] | — |
| Peripheral weight ring function | Maintains 2 orders of magnitude higher backside gas pressure for optimal heat transfer to the water cooled platen[1] | — |
| Coating options for shielding | Metal, ceramic or TiNx coatings[1] | — |
| Rotation | Rotating[1] | Rotating[3] |
| Backside gas pressure increase | 2 orders of magnitude higher[2] | — |
| Substrate diameter | up to 200 mm[1] | — |
| Motion | rotating[1] | — |
| Associated system usage | used with a BSG200 rotating wafer table equipped with helium gas backside cooling and programmable working distance adjustment[1] | — |
| Supported substrate size | — | Wafers or similar planar substrates up to 200 mm in diameter[3] |
| Backside gas pressure feature | — | Peripheral weight ring around the outer edge of the substrates helps maintain a 2 orders of magnitude higher backside gas pressure[3] |
| Compatibility | — | Load-lock compatible[3] |
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