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0010-03254 E ChuckversusCLX 10 K

Applied Materials 0010-03254 E Chuck, Comdel CLX 10 K, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
CLX 10 KComdel
OEMApplied MaterialsComdel
Category——
Wafer size——
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Introduced——
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Family—Comdel CLX 10 K
Specifications
Model—CLX 10 K[1]
Make—Comdel[1]
Type—Low Frequency RF Power Generator[2]
Power Output—10 kW[2]
Form Factor—3U rackmount[2]
DC Bus Input—48 VDC nominal[2]
RF Output Connector—BNC connector (rear panel)[2]
Remote Interface—D-Sub connector (rear panel)[2]
Cooling—Water-cooled[2]
Water Flow Requirement—13 L/min minimum flow[2]
Maximum Water Pressure—552 kPa[2]
Maximum Water Temperature—25°C[2]
Secondary Model—27-257659-00[2]
MPN—FP1605RA[2]
Date of Manufacture—2/10/05[2]
Revision—A[2]
Cooling Method—Water-cooled[3]
Model Number (Secondary)—27-257659-00[3]
Manufacturer Part Number (MPN)—FP1605RA[3]
Dimensions—27" x 19" x 6"[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]recycledgoods.comrecycledgoods.com
  3. [3]waferpedia.comwaferpedia.com