Waferpedia

Comparison ledger

0010-03254 E Chuckversus4PP-TypeB

Applied Materials 0010-03254 E Chuck, KLA 4PP-TypeB, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA 4PP-TypeB
Cited variants—
Specifications
product type—Four-point probe[1]
Probe spacing—1 mm[2]
Tip radius—100 µm[2]
Weight—100 gm[2]
Application—general purpose implantation measurement[2]
Compatible systems—Filmetrics R50 / R54 4PP measurement systems[2]
Compatible measurement systems—Filmetrics R50 / R54 4PP measurement systems[2]
Spacing—1mm[2]
Force—100gm[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]store.kla-instruments.comstore.kla-instruments.com
  2. [2]store.kla-instruments.comstore.kla-instruments.com