Comparison ledger
Applied Materials 0010-03254 E Chuck, Pfeiffer TPU 170 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | TPU 170 TurbomolecularPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Pfeiffer TPU |
| Specifications | ||
| Pumping Speed | — | 170 l/s[1] |
| Oil Filling | — | 2 × 6 cm³[1] |
| Type | — | Turbomolecular vacuum pump[2] |
| Weight | — | 20 lbs[3] |
| Ultimate pressure | — | 1 x 10 -9 mbar[4] |
| Inlet flange | — | DN 100 CF / CF flange[4] |
| Cooling requirement | — | 15 l/h at watertemperatur 15C[5] |
| Pumping speed | — | 170 liters per second[5] |
| Ultimate Pressure | — | 1×10⁻⁹ mbar[4] |
| Inlet Flange | — | DN 100 CF[4] |
| Cooling Requirement | — | 15 l/h at 15 °C water temperature[1] |