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Comparison ledger

0010-03254 E ChuckversusRF 300 A Photo Track

Applied Materials 0010-03254 E Chuck, SCREEN RF 300 A Photo Track, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsSCREEN
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—SCREEN RF 300 A Photo Track
Specifications
Configuration—Modifications:[1]
Robot Change—IHU, MHU (2), BHU[1]
Bake—CP (6), FRHP (7)[1]
Make—SCREEN / DNS[1]
Model—RF 300 A[1]
Modifications—Robot Change: IHU, MHU (2), BHU; Bake: CP (6), FRHP (7); Loadport (10); Cleanbooth; SC Cup Parts (2) (change and retrofit); SD Cup Parts, Nozzle (2) (change and retrofit); 10 L Nowpack Cabinet; ETU-Cab; Resist 8 High Viscosity (140 cp); Low Height Mod (Top Module Separation); BARC/Resist Separation Drain; Facility Connection Parts (change and retrofit); Power BOX Mod Parts (change and retrofit); Fire Suppression[1]
Resist 8 High Viscosity—140 cp[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com