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0010-13627 High Efficiency RF MatchversusG 50 D Rotary Vacuum

Applied Materials 0010-13627 High Efficiency RF Match, Ulvac G 50 D Rotary Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsUlvac
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-13627 High Efficiency RF MatchUlvac G 50 D Rotary Vacuum
Specifications
ConfigurationHE, BIAS[1]Two stage[2]
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]Two-stage rotary vacuum pump[2]
Frequency rating—50/60 Hz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing