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Comparison ledger

0010-14300 Magnet AssyversusVIISTA Trident XP Ion Implant

Applied Materials 0010-14300 Magnet Assy, Applied Materials VIISTA Trident XP Ion Implant, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
OEMApplied MaterialsApplied Materials
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyApplied Materials VIISTA
Specifications
ConfigurationP4 Magnet Assy, IMP[1]—
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Process Type—Standard[2]
Scan Harness—Standard - Continuous[2]
Beamline—XP[2]
Profiler—Gen II Multipixel 2 piece cup[2]
Process Chamber Line Kit—Full Coverage[2]
Seismic Kit—Seismic[2]
Chiller—SMC Remote 20M[2]
Differential pumping—Standard[2]
Cryo Pump—OBIS 320FX w/ IS2000V(1) PSI[2]
Cryo Pump Facilities POC—SS Cryo Exh UP-Rough. DN-Hel.DN[2]
Power Kit—Std w/3 Pole 175A[2]
UPS—Standard UPS 3KVA[2]
Facilities (Air-N2-H2O)—Faci fr Bott w Manifold - Std[2]
Frequency—60 Hz Operation[2]
Injector Kit—XP (LDPL) Vapo Ready[2]
Control system—w/ Hard disk drives[2]
Label Kit—Chinese Label Kit[2]
Load Lock Vent—Standard Finish[2]
Load Lock Vent Connection—Vent Connection Std Finish[2]
Elevator Chamber selection—Standard - TGV w/Peek[2]
OEM—Applied Materials / Varian[2]
Model—VIISTA Trident XP[2]
Orienter Selection—Laser - Belt drive 300mm[2]
Remote Harness Kit—20M-Rem Harn/Heli-IS2000V[2]
Roughing Pump Supply—Customer Supplied Pumps Onsite[2]
Rough Pump Type—Edwards iGX100MTi - iGX100L[2]
Rough Pump Exhaust—Universal RP Exh - Floor[2]
Turbo Pump Supply—Customer Supplied Pumps Onsite[2]
Turbo Pump Type—Pfeiffer HI-PACE 2300[2]
Wafer Handler Side Window Kit—Side Window Kit[2]
VCS Software Package Version—VCS 9.XX (Latest revision)[2]
Plasma Flood Gun—XP-Standard Gas Box[2]
Gas Box—10 Position[2]
Gas Box Exhaust—10 Stk GB Dual Exh FM4910 - Up[2]
Manometer—Quad Mano 10Stk GB 0-1000 Pa[2]
Gas Stick Slot 1—HP Ar/N2 CGA 580[2]
Gas Stick Slot 2—PraxAir Boron VCR 1/4[2]
Gas Stick Slot 3—PraxAir Arsine[2]
Gas Stick Slot 4—PraxAir Phosphine - NSR[2]
Gas Stick Slot 5—Praxair CO[2]
Gas Stick Slot 6—PraxAir GeF4 - NSR[2]
Gas Stick Slot 7—Praxair Boron VCR 1/4[2]
Gas Stick Slot 8—XeH2[2]
Gas Stick Slot 9—HP N2 CGA 580[2]
Purge Assembly Slot 7 & 10—N2 w/Ext Fd - 10 Stick[2]
SS gaskets for all gas sticks—10 stick gas box[2]
Argon External Purge Assembly—Ar Ext Purge w/Reg (Pos1)-Std[2]
Control System—with Hard disk drives[2]
Wafer Handling (Orienter)—Laser - Belt drive 300mm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing