Waferpedia

Comparison ledger

0010-14300 Magnet Assyversus350D

Applied Materials 0010-14300 Magnet Assy, Varian 350D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
350DVarian
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced—1986
Production run—1986–
Lifecycle—Discontinued
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyVarian 350D
Specifications
ConfigurationP4 Magnet Assy, IMP[1]—
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Type—medium current implanter[2]
Relationship to 300 XP—industry-standard predecessor platform that the 300 XP evolved from[2]
Usage period—tool of choice during the early 1980s[2]
Wafer sizes—4 inch and 6 inch[3]
Implant species—Boron (B11 or BF2) and Phosphorus (P31)[3]
Energy range—10 keV to 200 keV[3]
Dose range—1E12 to 5E15 ions/cm²[3]
End stations—Independent dual end stations[2]
Wafer handling—Vertical, edge-only wafer handling[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]yumpu.comyumpu.com