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0010-16392 ESC Assemblyversus2300 V 2 Kiyo 45 Metal

Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 V 2 Kiyo 45 Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research 2300 V 2 Kiyo 45 Metal
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]2300 V 2 Kiyo 45 Metal[3]
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Chamber PM 1—Kiyo[3]
Chamber PM 2—Kiyo[3]
Chamber PM 3—K45[3]
Chamber PM 4—K45[3]
Manufacturer—Lam Research[4]
Category—Etch[4]
Wafer size—12 inch[3]
Load ports—3[3]
Configuration—4 chambers: PM 1 Kiyo, PM 2 Kiyo, PM 3 K45, PM 4 K45[4]
HDD—not included[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com