Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Alliance A 6 TCP 9400 DFM Polysilicon, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Alliance A 6 TCP 9400 DFM PolysiliconLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Alliance A 6 TCP 9400 DFM Polysilicon |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 8 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208 VAC[4] |
| Frequency | — | 50/60 Hz[4] |
| Full Load Current | — | 43 A[4] |
| Short Circuit Interrupting Capacity | — | 10 kA[4] |
| Main Circuit Breaker Rating | — | 50 A[4] |
| Software Version | — | A4.0-37VM[3] |
| ESC Material | — | Anodized Aluminum[3] |
| Interferometer EP | — | PM4[3] |
| Gas Box | — | Enhanced Universal (12 sticks)[3] |
| Pumps | — | Busch DS 80 Cobra, Busch BA 100 (2)[3] |
| Chillers | — | TCU Edwards 40/80 Plus, RPM Voltage SAG Enhanced[3] |
| Transport Module | — | TCP 9400 FM-P (Tungsten Silicide Etch)[3] |
| Software | — | A4.0-37VM[3] |
| PM4 | — | TCP 9400D FM-P, Wsix Etch[3] |
| ESC | — | Anodized Aluminum[3] |
| TCU | — | Edwards 40/80 Plus[3] |
| RPM | — | Voltage SAG Enhanced[3] |
| Main CB Current Rating | — | 50 A[4] |
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