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Comparison ledger

0010-16392 ESC AssemblyversusFlex DS

Applied Materials 0010-16392 ESC Assembly, Lam Research Flex DS, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Flex DSLam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research Flex DS
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]—
TypeESC Assembly[1]Etcher with EFEM[4]
Wafer Size300 mm[2]300mm (12 inch)[4]
Electrode ConfigurationDual[2]—
Configuration—With Equipment Front End Module (EFEM)[3]
Manufacturer—Lam Research[3]
Category—Etch[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com