Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Rainbow 4506 I, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Rainbow 4506 ILam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Rainbow |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | Plasma etcher[4] |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Oxide Etch[3] |
| Wafer type | — | Jeida flat[3] |
| Valve type | — | AC4 Throttle / VAT Throttle[3] |
| Software | — | Classic 7.31-42[3] |
| RF | — | PDW2200 400Kc generator (main chamber)[3] |
| Robot type | — | Harmonic Drive[3] |
| Loader type | — | Hine indexers 38A[3] |
| Loadlock | — | Entrance (ISO chmbr) and Exit LL[3] |
| Turbo pumps | — | No[3] |
| Controllers | — | VAT controller ISO THV / AC4 controller main chamber THV[3] |
| GAS 1 | — | Ar: 500 sccm[3] |
| GAS 2 | — | CF4: 100 sccm[3] |
| GAS 3 | — | CHF3: 50 sccm[3] |
| GAS 4 | — | He: 1000 sccm[3] |
| GAS 5 | — | O2: 20 sccm[3] |
| GAS 6 | — | N2: 540 sccm[3] |
| Wafer sizes | — | 6 inch, 8 inch[3] |
| Process | — | Oxide etch[3] |
| Endpoint | — | Monochromator Endpoint[3] |
| RF cart | — | Present[3] |
| ISO module | — | Present[3] |
| GAS 7 | — | NF3: 1150 sccm[3] |
| GAS 8 | — | He: 480 sccm[3] |
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