Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research SEZ 323 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | SEZ 323 SpinLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | Single wafer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research SEZ |
| Cited variants | — | |
| Specifications | ||
| OEM | Applied Materials[4] | Lam / SEZ[6] |
| Model | 0010-16392[4] | 323[6] |
| Type | ESC Assembly[4] | — |
| Wafer Size | 300 mm[5] | — |
| Electrode Configuration | Dual[5] | — |
| Configuration | — | Chambers (2)[6] |
| Wafer Sizes | — | 8, 12 inch[6] |
| Chambers | — | 2[6] |
| Wafer sizes | — | 8 inch, 12 inch[6] |
| Number of chambers | — | 2[6] |
| Tool type | — | Spin Etcher[6] |
| Voltage | — | 400 VAC[2] |
| Phase | — | 3 Phase[2] |
| Max. Current | — | 75 A[2] |
| Wafer size | — | Single wafer[2] |
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