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0010-18024 Pyrometer AssemblyversusDektak 150 Surface

Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dektak 150 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBruker
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-18024 Pyrometer AssemblyBruker Dektak 150 Surface
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Manufacturer—Bruker / Veeco[2]
Model—Dektak 150[2]
Type—Surface profilometer[2]
Description—Advanced thin and thick film step height measurement tool[3]
Measurement capabilities—Surface topography, waviness, and surface roughness[3]
Step-height repeatability—0.6 nm[3]
Maximum substrate size—6 inch[3]
Sample dimension—up to six inches in dimension[3]
Sample thickness—up to four inches thick[3]
Stage—Single-axis 4-inch Y auto stage[3]
3D imaging—Enables mapping of 3D images[3]
Vertical resolution—1 Ångström[4]
Vertical range—524 µm[4]
Stylus radius—12.5 µm, 5.0 µm, 2.5 µm[4]
Measurement method—Contact stylus[5]
Maximum sample size—150 mm (6-inch)[5]
Scan length—55 mm[5]
Optional vertical range—1 mm[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]nnci.netnnci.net
  4. [4]nuance.northwestern.edunuance.northwestern.edu
  5. [5]directadvop.comdirectadvop.com