Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 4800 II, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | S 4800 IIHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi S 4800 |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | No HDD or EDX[2] |
| Process Type | — | FA-SEMs/TEMs/Dual Beams[3] |
| LM mode | — | 20 ~ 2,000X[3] |
| HM mode | — | 100 ~ 800,000X[3] |
| Type KK | — | X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70*, R: 360*[3] |
| Operating System | — | Windows XP[3] |
| Tool type | — | Scanning electron microscope (SEM)[2] |
| Secondary electron image resolution | — | 1.0 nm (15 kV, WD+4 mm); 1.4 nm (1 kV, WD=1.5 mm, deceleration mode); 2.0 nm (1 kV, WD-1.5 mm, normal mode)[3] |
| Magnification | — | LM mode: 20 to 2,000X; HM mode: 100 to 800,000X[3] |
| Specimen stage | — | 5-axis stage motorization; Type KK: X 0 to 110 mm, Y 0 to 110 mm, Z 1.5 to 40 mm, T -5 to +70°, R 360°[3] |
| Version | — | 200 mm Vintage[4] |
| Description | — | FE SEM[4] |
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