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0010-18024 Pyrometer AssemblyversusScientific FEI Quanta 200

Applied Materials 0010-18024 Pyrometer Assembly, Thermo Fisher Scientific FEI Quanta 200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyThermo Fisher Scientific FEI Quanta
Cited variants—
  • Scientific FEI Quanta 200 3 D FEG Dual Beam[1]
Specifications
ConfigurationCapable of working on Applied Materials Radiance[2]15 A[3]
Peltier stage—–25 to +55 °C[3]
Hot-Stages(2)—max temperature 1000 °C, 1500 °C[3]
Manufacturer—Thermo Fisher Scientific / FEI[3]
Model—Quanta 200[3]
Tool type—Scanning electron microscope[3]
Power—15 A[3]
Electrical—50/60 Hz; 210-240 V[3]
Electron detector modes—LFD secondary electrons; GSED secondary electrons; GBSD secondary electrons; GBSD back-scattered electrons[3]
Stage—Peltier stage: –25 to +55 °C[3]
Hot stages—2; maximum temperature 1000 °C and 1500 °C[3]
EDS detector—Oxford INCA-350 X-ray EDS detector[3]
Computers—2 PCs[3]
Storage—Hard Disk Drives (HDDs)[3]
Known issue—The secondary electron detector is currently non-functional.[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing