Comparison ledger
Applied Materials 0010-21246 Part, Edwards EPX 500 LE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | EPX 500 LEEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards EPX 500 LE |
| Specifications | ||
| Ultimate vacuum | — | < 7 x 10^-7 Torr[1] |
| Pumping speed | — | 295 CFM[1] |
| Inlet flange | — | ISO63[1] |
| Exhaust flange | — | KF25[1] |
| Weight | — | 99 lbs[1] |
| Electrical supply | — | 208 VAC 3PH[2] |
| Water connector size | — | 3/8 in.[2] |
| Inlet size (alternative) | — | ISO 160[2] |
| Part number (without TIM) | — | A41953012[2] |
| Operating pressure range | — | Atmosphere to < 7 x 10^-7 Torr[2] |
| OEM | — | Edwards[3] |
| Model | — | EPX 500 LE[3] |
| Type | — | dry pump[1] |
| Description | — | all-in-one atmosphere-to-hiVac dry vacuum pump[2] |
| Inlet | — | ISO 160[2] |
| Power | — | 208 VAC, 3-phase[2] |
| Type of product | — | dry pump[1] |
| Exhaust | — | KF25[1] |
| Power supply | — | 208 VAC 3PH[2] |
| Water connector | — | 3/8 in.[2] |
| Manufacturer | — | Edwards[3] |
| Product description | — | all-in-one atmosphere-to-hiVac dry vacuum pump[2] |
| Series feature | — | End User Controller (EUC)[2] |