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Comparison ledger

0010-21246 PartversusHRS-600HS-20

Applied Materials 0010-21246 Part, Espec HRS-600HS-20, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsEspec
Category——
Wafer size——
Process node——
Introduced——
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Family—Espec HRS-600HS-20
Specifications
Model—HRS-600HS-20[1]
Series—HRS rapid-rate thermal cycle chamber[1]
Temperature and humidity range—−70°C to +180°C / 20%rh to 98%rh[1]
Temperature rate of change—20°C/min[1]
Interior dimensions—1000×1000×600 mm[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp