Waferpedia

Comparison ledger

0010-21246 Partversus4-point

Applied Materials 0010-21246 Part, Veeco 4-point, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
4-pointVeeco
OEMApplied MaterialsVeeco
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Veeco 4-point
Specifications
Listed in metrology suite—Veeco 4-point probe[1]
Maximum substrate size—6 inch[2]
Measurement capabilities—Sheet resistance, slice resistivity, V/I, metallization thickness, P‑N type testing[3]
Probe mechanism—Wafer is moved into the probe head, not vice versa[3]
Measurement Capabilities—Sheet resistivity, slice resistivity, metallization thickness, P-N type testing[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]cores.research.asu.educores.research.asu.edu
  2. [2]nnci.netnnci.net
  3. [3]nrf.aux.eng.ufl.edunrf.aux.eng.ufl.edu