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0010-22161 High EFF RF MatchversusATM ABM 105 107 107 B Atmospheric Wafer Handling Robot

Applied Materials 0010-22161 High EFF RF Match, Brooks ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBrooks
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FamilyApplied Materials 0010-22161 High EFF RF MatchBrooks ATM
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]ATM / ABM 105 / 107 / 107 B[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Single Arm[3]
Manufacturer—Brooks / PRI[3]
Type—Atmospheric wafer handling robot[3]
Wafer size—6 inch and 12 inch[3]
Arm configuration—Single arm[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing