Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, CEE Apogee 450 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | |
|---|---|---|
| OEM | Applied Materials | CEE |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | CEE Apogee |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | Apogee 450[3] |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Configuration | — | 208-240 V[3] |
| Equipment type | — | Spin coater[3] |
| Wafer sizes | — | 6, 8, 12 inch[3] |
| Max substrate size | — | 450 mm round or 14" x 14" square[4] |
| Max spin speed | — | 6,000 rpm[4] |
| Max acceleration | — | 30,000 rpm/s[4] |
| Spin speed repeatability | — | 0.2 rpm[4] |
| Acceleration resolution | — | < 0.2 rpm/s[4] |
| Spin speed resolution | — | 0.2 rpm[4] |
| GUI | — | 7-inch full-color touchscreen[4] |
| Number of recipes | — | Unlimited[4] |
| Step time resolution | — | 0.1 s[4] |
| Weight | — | 85 lb (38.6 kg)[4] |
| Voltage | — | 208-230 VAC[4] |
| Drain port | — | 3/4" OD[4] |
| Full load current | — | 6A (max)[4] |
| Exhaust port | — | 1.5" OD, 0.4” H2O @ 30 CFM (100 Pa @ 50 CMH)[4] |
| Vacuum | — | 1/4" push to connect, <33 kPa abs[4] |
| Automated dispense gas | — | N2/CDA, 70 psi (482 kPa)[4] |
| Interface | — | USB 2.0, Ethernet, StreamSync™ communication protocol[5] |
| Chamber material | — | HDPE spin bowl[5] |
| Vacuum and lid interlock | — | Yes[5] |