Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards IH 1800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IH 1800Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards IH 1800 |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Configuration | — | Fully refurbished[4] |
| Pumping speed | — | 1,060 CFM[5] |
| Ultimate pressure | — | 7.5 x 10^-4 Torr[5] |
| Inlet | — | ISO160[5] |
| Exhaust | — | KF40[5] |
| Motor | — | 3 Phase, 208-230/460V, 50/60Hz[5] |
| Weight | — | 1,107 lbs[5] |
| Dry pump component | — | HCDP160[1] |
| Mechanical booster component | — | HMB1800[1] |
| Pumping chamber lubrication | — | None (dry, no lubricating or sealing fluid)[1] |
| Motor cooling | — | Enclosed, water-cooled[1] |
| Gas system | — | Purge gas introduced into HCDP pump, with economiser gas mode[1] |
| Type | — | Dry pump[5] |
| Pump composition | — | HCDP160 dry pump with HMB1800 mechanical booster pump[1] |