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0010-22161 High EFF RF MatchversusiXH 1220 HTX Dry

Applied Materials 0010-22161 High EFF RF Match, Edwards iXH 1220 HTX Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2003 Vintage
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards iXH 1220 HTX Dry
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]iXH 1220 HTX[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Manufacturer—Edwards[3]
Type of product—dry pump[4]
Inlet—ISO100[4]
Exhaust—KF40[4]
Pumping speed—735.72 CFM[4]
Ultimate pressure—3.7 x 10-3 Torr[4]
Weight—1,007 lbs[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]provac.comprovac.com