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0010-22161 High EFF RF MatchversusHRS-357HS-20

Applied Materials 0010-22161 High EFF RF Match, Espec HRS-357HS-20, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEspec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEspec HRS-357HS-20
Cited variants—
  • HRS-600HS-20[1]
  • HRS-800HS-20[1]
  • HRS-1800HS-20[1]
  • HRS-357HS-25[1]
  • HRS-600HS-25[1]
  • HRS-800HS-25[1]
  • HRS-1800HS-25[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]HRS-357HS-20[1]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Category—Rapid-rate thermal cycle chamber[1]
Temperature and humidity range—−70℃ to +180℃ / 20%rh to 98%rh[1]
Temperature change rate—20℃/min[1]
Interior dimensions—700×850×600 mm[1]
Temperature range—−70℃ to +180℃[1]
Humidity range—20%rh to 98%rh[1]
Temperature rate of change—20℃/min[1]
Interior dimensions (W×H×D)—700×850×600 mm[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com