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0010-22161 High EFF RF MatchversusPWM 32 PS R 790 Spin

Applied Materials 0010-22161 High EFF RF Match, Headway PWM 32 PS R 790 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-22161 High EFF RF MatchApplied Materials
PWM 32 PS R 790 SpinHeadway
OEMApplied MaterialsHeadway
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF Match—
Cited variants—
  • PWM32-PS-R790[1]
  • PWM32-PS-CB15[1]
  • PWM32-BD-CB15[1]
  • PWM32-BD-LS22[1]
Specifications
MakeApplied Materials[2]Headway[4]
Model0010-22161[2]PWM 32 PS R 790[4]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Type—Spin Coater[4]
Spinner system—PS Motor[1]
Motor speed—up to 10,000 rpm[1]
Bowl inner diameter—7.9-inch I.D.[1]
Maximum recommended substrate dimension—5 inches[1]
0010-22161 High EFF RF Match entryPWM 32 PS R 790 Spin entryAsk about these tools →Share experience with this comparison →
Sources (4)Every fact above is drawn from these public sources
  1. [1]headwayresearch.comheadwayresearch.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]Equipment inventory listing