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0010-22161 High EFF RF MatchversusZ-5310

Applied Materials 0010-22161 High EFF RF Match, Hitachi Z-5310, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Z-5310Hitachi
OEMApplied MaterialsHitachi
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchHitachi Z-5310
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Insp—spectrophotometer/flame[3]
Optical system—Polarized Zeeman correction (DC magnetic field)[4]
Spectroscope—Czerny-Turner mount[4]
Burner—Premix type (titanium)[4]
Atomization—Flame method (standard)[4]
Wavelength range—190 to 900 nm[4]
Light source—Hollow cathode lamp (multi-element lamp turret)[5]
Detector—High-sensitivity photomultiplier tube[5]
Flame composition—Air-acetylene flame, nitrous oxide-acetylene flame (requires switching)[5]
Photometry—Double-beam (D2 background correction), single-beam (Zeeman)[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]dealer listingwotol.com
  4. [4]nicchukei.co.jpnicchukei.co.jp
  5. [5]nicchukei.co.jpnicchukei.co.jp