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0010-22161 High EFF RF MatchversusSeiki STP 1000 C Turbo

Applied Materials 0010-22161 High EFF RF Match, Seiko Epson Seiki STP 1000 C Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsSeiko Epson
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchSeiko Epson Seiki STP 1000 C Turbo
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Inlet—ISO200K[3]
Exhaust—KF40[3]
Pumping speed (N2)—1,000 l/s[3]
Compression ratio (N2)—> 10^8[3]
Ultimate pressure—7.5 × 10⁻¹⁰ Torr[3]
Weight—68 lbs[3]
Recommended controller—SCU-1000[3]
Recommended backing pump—E2M28 • E2M30[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]provac.comprovac.com