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0010-22161 High EFF RF MatchversusGamma 200 Spray

Applied Materials 0010-22161 High EFF RF Match, SUSS MicroTec Gamma 200 Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Gamma 200 SpraySUSS MicroTec
OEMApplied MaterialsSUSS MicroTec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchSUSS MicroTec GAMMA
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Coat Module (2)[3]
Wafer size—8 inch[3]
Coat modules—2[3]
Develop modules—2[3]
Vapor prime (HMDS) module—1[3]
Oven hot plates—3[3]
Cool plates—2[3]
Overhead HEPA filter—Yes[3]
High viscosity photoresist pumps—Yes[3]
Vintage—2014[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing