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0010-22161 High EFF RF MatchversusSE 600 10 10 Environmental

Applied Materials 0010-22161 High EFF RF Match, Thermotron SE 600 10 10 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron SE 600 10 10 Environmental
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Workspace dimensions (WxDxH)—40 x 26.25 x 34 inches (102 x 67 x 86 centimeters)[3]
Workspace volume—20.7 ft³ (586 L)[3]
Temperature uniformity—±0.5°C (±0.9°F)[3]
Temperature range—-70°C to 180°C (-94°F to 356°F)[3]
Temperature control tolerance—0.3°C (0.5°F)[3]
Approx. shipping weight—2,040 lbs (925 kg)[3]
Move-in dimensions (WxDxH)—49 x 70 x 83 inches (124 x 178 x 211 centimeters)[3]
Inlet water at 24°C / 75°F—9 gal/min (34 L/min)[3]
Inlet water at 18°C / 65°F—7.5 gal/min (28 L/min)[3]
Inlet water at 13°C / 55°F—6 gal/min (23 L/min)[3]
Inlet water at 29°C / 85°F—16 gal/min (60 L/min)[3]
Humidity range—10 to 98% RH[3]
Humidity control—+/- 2.5% RH[3]
Heating performance from -65°C to 71°C—9 minutes[3]
Heating performance from -65°C to 180°C—19 minutes[3]
Heating performance from -40°C to 85°C—8 minutes[3]
Heating rate from -65°C to 71°C—15.1°C/minute[3]
Heating rate from -65°C to 180°C—12.8°C/minute[3]
Heating rate from -40°C to 85°C—15.6°C/minute[3]
Electrical requirements at 460 / 3 / 60—41 full load amps[3]
Electrical requirements at 400 / 3 / 50—42 full load amps[3]
Electrical requirements at 230 / 3 / 60—81 full load amps[3]
Electrical requirements at 208 / 3 / 60—89 full load amps[3]
Cooling performance from 85°C to -40°C—11 minutes[3]
Cooling performance from 71°C to -65°C—17 minutes[3]
Cooling performance from 180°C to -65°C—28 minutes[3]
Cooling rate from 85°C to -40°C—11.3°C/minute[3]
Cooling rate from 71°C to -65°C—8°C/minute[3]
Cooling rate from 180°C to -65°C—8.7°C/minute[3]
Airflow—1,000 CFM[3]
Workspace dimensions—40" wide x 26.25" deep x 34" high (102 cm wide x 67 cm deep x 86 cm high)[4]
Heated window—15" wide x 19" high (38 cm wide x 48 cm high)[4]
Compressors—Two 10 horsepower scroll compressors in cascade[4]
Chamber heater—16KW[4]
Circulator motor—One 1/2 horsepower, 1725 RPM[4]
Shipping weight—Approximately 1700 pounds (771 kg)[4]
Construction material—Internal liner: 18 gauge, series 300 stainless steel; exterior: die-formed 16 gauge treated sheet steel[4]
Electrical power—230 volt (±5%), 3 phase, 60 cycle; recommended minimum service 90 amps, or 460 volt (±5%), 3 phase, 60 cycle; recommended minimum service 50 amps[4]
Cooling water at 85°F inlet temperature—16 GPM[4]
Cooling water at 75°F inlet temperature—9 GPM[4]
Cooling water at 65°F inlet temperature—6 GPM[4]
Minimum pressure—30 PSI[4]
Maximum pressure—125 PSI[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]thermotron.comthermotron.com
  4. [4]lre.comlre.com