Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusHeliot 700 Helium Leak Detector

Applied Materials 0010-22161 High EFF RF Match, Ulvac Heliot 700 Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsUlvac
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchUlvac Heliot 700 Helium Leak Detector
Cited variants—
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]Heliot 700[5]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Manufacturer—ULVAC (Japan)[4]
Type / model designation—701[1]
Sensitivity (super fine leak flow setting)—10⁻¹³ Pa·m3/s[4]
Sensitivity (fine leak flow setting)—10⁻¹¹ Pa·m3/s[4]
Main pump—25 L/s compound molecular pump[4]
Fore pump—Oil rotary pump / Scroll pump / Membrane pump[4]
Power supply options—AC100V, AC200V[4]
Line input (unit)—AC115V, 50/60Hz, 1.0 kVA[1]
Test port—NW25[4]
Warm-up time—3 min (quick start setting)[4]
Shutdown time—3 min[4]
Test screen—Graph, meter and value / color touch panel[4]
Mass—43.0 kg[1]
Sources (5)Every fact above is drawn from these public sources
  1. [1]bidspotter.combidspotter.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]isi-vietnam.comisi-vietnam.com
  5. [5]Equipment inventory listing