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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus40 NT

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group 40 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
40 NTEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedEV Group 40
Specifications
ConfigurationRefurbished[1]50/60 Hz[2]
Voltage—230 V[2]
Product type—Automated Measurement System[3]
Tool format—stand-alone tool[3]
Integrated module—AVM (HVM-integrated module)[3]
Measurement scope—lithography-relevant parameters and bond alignment accuracy[3]
Measurement methods—critical dimension measurement, die-to-die alignment verification, multi-layer thickness measurement[3]
Application examples—nanoimprint lithography and wafer-to-wafer bonding[3]
Verification capability—100 nm bond overlay accuracy of EVG's GEMINI FB automated fusion bonding system[3]
Microscope configuration—top- to bottom-side microscope[3]
Software—PC-based measurement and pattern recognition software[3]
Throughput support—specialized calibration routine[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]evgroup.comevgroup.com