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0010-47763 ASSY ESC Bonded Monopolar Dual Heatedversus620 BA

Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group 620 BA, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
620 BAEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedEV Group 620 BA
Specifications
ConfigurationRefurbished[1]Desktop with optional system rack[2]
Alignment method—Backside alignment, transparent alignment, IR alignment (optional)[2]
Backside alignment accuracy—±2 µm (3σ)[2]
Transparent alignment accuracy—±1 µm (3σ)[2]
Wafer sizes—2", 3", 100 mm, 150 mm[2]
Wafer thickness—0.1 - 10 mm[2]
Max stack height—10 mm[2]
Vibration isolation—Passive[2]
Alignment stage—Manual precision micrometers, optional motorized, automated wedge compensation[2]
Microscopes—Fully motorized high-resolution bottom-side microscopes[2]
User interface—Windows-based[2]
Handling—Standard 3 cassette stations, optional up to 5 stations[2]
Automatic alignment—Optional[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]evgroup.comevgroup.com