Comparison ledger
Applied Materials 0010 47763, Lam Research Alliance A 6 TCP 9400 DFM Polysilicon, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | Alliance A 6 TCP 9400 DFM PolysiliconLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research Alliance A 6 TCP 9400 DFM Polysilicon |
| Specifications | ||
| Configuration | 2nd Source New[1] | — |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | — |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Wafer Size | — | 8 inch[4] |
| Voltage | — | 208 VAC[5] |
| Frequency | — | 50/60 Hz[5] |
| Full Load Current | — | 43 A[5] |
| Short Circuit Interrupting Capacity | — | 10 kA[5] |
| Main Circuit Breaker Rating | — | 50 A[5] |
| Software Version | — | A4.0-37VM[4] |
| ESC Material | — | Anodized Aluminum[4] |
| Interferometer EP | — | PM4[4] |
| Gas Box | — | Enhanced Universal (12 sticks)[4] |
| Pumps | — | Busch DS 80 Cobra, Busch BA 100 (2)[4] |
| Chillers | — | TCU Edwards 40/80 Plus, RPM Voltage SAG Enhanced[4] |
| Transport Module | — | TCP 9400 FM-P (Tungsten Silicide Etch)[4] |
| Software | — | A4.0-37VM[4] |
| PM4 | — | TCP 9400D FM-P, Wsix Etch[4] |
| ESC | — | Anodized Aluminum[4] |
| TCU | — | Edwards 40/80 Plus[4] |
| RPM | — | Voltage SAG Enhanced[4] |
| Main CB Current Rating | — | 50 A[5] |
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