Comparison ledger
Applied Materials 0010 47763, Lam Research TCP 9400 SE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | TCP 9400 SELam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research TCP 9400 SE |
| Cited variants | — | |
| Specifications | ||
| Configuration | 2nd Source New[3] | — |
| Type | Monopolar Dual Heated[4] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[5] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4] | — |
| Model | 0010-47763[3] | — |
| OEM | Applied Materials[3] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[4] | — |
| Quantity available (source) | 1[4] | — |
| Software Revision | — | E1.6.1-002[6] |
| Main UI PN | — | PC NEXT 33[6] |
| ESC | — | 718-094523-281[6] |
| Liner | — | 715-030329-002[6] |
| GAZ Box Réf | — | 853-024403-104[6] |
| Platform | — | Rainbow[7] |
| Source type | — | Inductively coupled (TCP)[7] |
| Wafer size | — | 200 mm (8 inch)[6] |
| Chamber configuration | — | Single chamber[7] |
| Wafer transport | — | Cassette to cassette[7] |
| Vacuum pump | — | Leybold TURBOVAC 1000C[1] |
| Software version | — | Envision version 1.4[1] |
| End point detection | — | Emission and interferometric[7] |
| Ceramic free chamber | — | Yes[1] |
| Waferless auto clean (WAC) | — | Yes[1] |
| CE Certified | — | Yes[1] |
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