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Comparison ledger

0020 12458 PartversusTrias High K

Applied Materials 0020 12458 Part, Tokyo Electron Trias High K, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
Trias High KTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartTokyo Electron Trias High K
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]2 chambers: CVD and ALD[4]
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]Trias High K[2]
Manufacturer—Tokyo Electron[2]
Category—Deposition[3]
Process type—CVD (Chemical Vapor Deposition)[2]
Wafer size—12 inch[2]
Version—300 MM[4]
Vintage—2010[4]
Process—NiOx, HfOx[4]
Node—<45nm process[4]
Loadports—2[4]
Plasma capability—No[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com