Waferpedia

Comparison ledger

0020 17485 PartversusEi 5 Au

Applied Materials 0020 17485 Part, Ulvac Ei 5 Au, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
Ei 5 AuUlvac
OEMApplied MaterialsUlvac
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartUlvac Ei 5 Au
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]Ulvac LR90 Dry Pump[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing