Waferpedia

Comparison ledger

0020 18698 PartversusOTFC 1300 Thin Film

Applied Materials 0020 18698 Part, Optorun OTFC 1300 Thin Film, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
OEMApplied MaterialsOptorun
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartOptorun OTFC 1300
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]Optical Monitor System, Quartz Crystal Film Thickness, and Deposition Rate Monitor Optical Monitor: 60 points[2]
RF ion Beam Source—OIS-TwoPLUS、17cm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing