Waferpedia

Comparison ledger

0020 23839 PartversusTrias High K

Applied Materials 0020 23839 Part, Tokyo Electron Trias High K, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
Trias High KTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartTokyo Electron Trias High K
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]2 chambers: CVD and ALD[4]
Manufacturer—Tokyo Electron[2]
Model—Trias High K[2]
Category—Deposition[3]
Process type—CVD (Chemical Vapor Deposition)[2]
Wafer size—12 inch[2]
Version—300 MM[4]
Vintage—2010[4]
Process—NiOx, HfOx[4]
Node—<45nm process[4]
Loadports—2[4]
Plasma capability—No[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com