Waferpedia

Comparison ledger

0020 81665 Partversus3 NX 540 B A 302 Atmospheric Wafer Robot

Applied Materials 0020 81665 Part, Kawasaki 3 NX 540 B A 302 Atmospheric Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 81665 PartApplied Materials
OEMApplied MaterialsKawasaki
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 81665 PartKawasaki 3 NX 540 B A 302 Atmospheric Wafer Robot
Specifications
ConfigurationGuide, Fiber Mount, Ude, Lk[1]Compatible with AMAT Producer[2]
Type—Atmospheric Wafer Robot[2]
Wafer Size—12 inch[2]
Compatibility—AMAT Producer[2]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing