Waferpedia

Comparison ledger

0021 20868 PartversusATM 204 207 Atmospheric Wafer Handling Robot

Applied Materials 0021 20868 Part, Brooks ATM 204 207 Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartBrooks ATM
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[1]Single Arm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing