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Comparison ledger

0021 20868 PartversusTPU 060 Turbomolecular Vacuum

Applied Materials 0021 20868 Part, Pfeiffer TPU 060 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartPfeiffer TPU
Cited variants—
  • TPU 060 Mod PM P 01 401[1]
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[2]—
Mod—PM P 01 401[3]
Manufacturer—Pfeiffer[1]
Model—TPU 060[1]
Description—Turbomolecular vacuum pump[3]
Type—Turbomolecular high vacuum system[4]
Make—Pfeiffer[1]
Modification Code—PM P 01 401[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]reticulum.onlinereticulum.online