Waferpedia

Comparison ledger

0021 32427 Partversus3 NX 540 B A 302 Atmospheric Wafer Robot

Applied Materials 0021 32427 Part, Kawasaki 3 NX 540 B A 302 Atmospheric Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 32427 PartApplied Materials
OEMApplied MaterialsKawasaki
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 32427 PartKawasaki 3 NX 540 B A 302 Atmospheric Wafer Robot
Specifications
ConfigurationCooling Plare, Countermatch,300mm Produc[1]Compatible with AMAT Producer[2]
Type—Atmospheric Wafer Robot[2]
Wafer Size—12 inch[2]
Compatibility—AMAT Producer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing